International Journal of
Physical Sciences

  • Abbreviation: Int. J. Phys. Sci.
  • Language: English
  • ISSN: 1992-1950
  • DOI: 10.5897/IJPS
  • Start Year: 2006
  • Published Articles: 2577

Full Length Research Paper

Study on laser etching mechanism of aluminum thin film on polyimide

Liu Xiao-Li
  • Liu Xiao-Li
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Xiong Yu-Qing
  • Xiong Yu-Qing
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Ren Ni
  • Ren Ni
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Yang Jian-Ping
  • Yang Jian-Ping
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wang Rui
  • Wang Rui
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wu Gan
  • Wu Gan
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wu Sheng-Hu
  • Wu Sheng-Hu
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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  •  Received: 20 January 2015
  •  Accepted: 16 April 2015
  •  Published: 16 May 2015

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