International Journal of
Physical Sciences

  • Abbreviation: Int. J. Phys. Sci.
  • Language: English
  • ISSN: 1992-1950
  • DOI: 10.5897/IJPS
  • Start Year: 2006
  • Published Articles: 2572

Full Length Research Paper

Study on laser etching mechanism of aluminum thin film on polyimide

Liu Xiao-Li
  • Liu Xiao-Li
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Xiong Yu-Qing
  • Xiong Yu-Qing
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Ren Ni
  • Ren Ni
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Yang Jian-Ping
  • Yang Jian-Ping
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Wang Rui
  • Wang Rui
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Wu Gan
  • Wu Gan
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar
Wu Sheng-Hu
  • Wu Sheng-Hu
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
  • Google Scholar


  •  Received: 20 January 2015
  •  Accepted: 16 April 2015
  •  Published: 16 May 2015

How to cite this article

APA /
Xiao-Li, L., Yu-Qing, X., Ni, R., Jian-Ping, Y., Rui, W., Gan, W., & Sheng-Hu, W. (2015). Study on laser etching mechanism of aluminum thin film on polyimide. International Journal of Physical Sciences, 10(9), 318-323.
Chicago /
Liu Xiao-Li, Xiong Yu-Qing, Ren Ni, Yang Jian-Ping, Wang Rui, Wu Gan and Wu Sheng-Hu. "Study on laser etching mechanism of aluminum thin film on polyimide." International Journal of Physical Sciences 10, no. 9 (2015): 318-323.
MLA /
Liu Xiao-Li, et al. "Study on laser etching mechanism of aluminum thin film on polyimide." International Journal of Physical Sciences 10.9 (2015): 318-323.