International Journal of
Physical Sciences

  • Abbreviation: Int. J. Phys. Sci.
  • Language: English
  • ISSN: 1992-1950
  • DOI: 10.5897/IJPS
  • Start Year: 2006
  • Published Articles: 2578

Full Length Research Paper

Study on laser etching mechanism of aluminum thin film on polyimide

Liu Xiao-Li
  • Liu Xiao-Li
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Xiong Yu-Qing
  • Xiong Yu-Qing
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Ren Ni
  • Ren Ni
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Yang Jian-Ping
  • Yang Jian-Ping
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wang Rui
  • Wang Rui
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wu Gan
  • Wu Gan
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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Wu Sheng-Hu
  • Wu Sheng-Hu
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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  •  Received: 20 January 2015
  •  Accepted: 16 April 2015
  •  Published: 16 May 2015

How to cite this article

APA /
Xiao-Li, L., Yu-Qing, X., Ni, R., Jian-Ping, Y., Rui, W., Gan, W., & Sheng-Hu, W. (2015). Study on laser etching mechanism of aluminum thin film on polyimide. International Journal of Physical Sciences, 10(9), 318-323.
Chicago /
Liu Xiao-Li, Xiong Yu-Qing, Ren Ni, Yang Jian-Ping, Wang Rui, Wu Gan and Wu Sheng-Hu. "Study on laser etching mechanism of aluminum thin film on polyimide." International Journal of Physical Sciences 10, no. 9 (2015): 318-323.
MLA /
Liu Xiao-Li, et al. "Study on laser etching mechanism of aluminum thin film on polyimide." International Journal of Physical Sciences 10.9 (2015): 318-323.
DOI /
https://doi.org/10.5897/IJPS2015.4261
URL /
https://ftp.academicjournals.org/journal/IJPS/article-abstract/3C39B9D52942

Copyright © 2025 Author(s) retain the copyright of this article.

This article is published under the terms of the Creative Commons Attribution License 4.0

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